Molecular Foundry Seminar

"Templated Block Copolymers for Nanolithography"

Prof. Caroline A. Ross, Toyota Professor of Materials Science and Engineering, MIT
Tuesday, September 20th at 1:30 pm, Bldg. 66 - Auditorium

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Abstract:

The self-assembly of block copolymer films produces periodic nanoscale patterns that may be useful in extending fabrication length-scales beyond the limits of optical lithography, in a process that can be accomplished rapidly and at low cost. This seminar describes the characteristics of polymers that are useful in nanolithography and the thermal and solvent annealing needed to produce a range of microdomain morphologies in the films. Templating strategies will be introduced based on substrate topography to impose long-range order in the self-assembly. The production of more complex patterns from triblock terpolymers, such as arrays of rings or square-symmetry posts, will be described.  Self-consistent field theory modeling preducts the 3D structure of the block copolymer microdomains. Examples of pattern transfer to metals, oxides and polymers and device fabrication will be shown.