See the Foundry's full equipment list

Imaging Capabilities & Tools

Instrument Scheduler

Major Capabilities & Instruments

JEOL 2100-F 200 kV Field-Emission Analytical Transmission Electron Microscope

This instrument is equipped with an analytical pole piece, a high solid-angle EDS (energy dispersive spectroscopy) system for elemental x-ray analysis, a Gatan Tridiem spectrometer for energy-filtered imaging and spatially-resolved EELS (electron energy loss spectroscopy), a HAADF (high-angle annular dark field) STEM detector, and several digital cameras. In addition to the single, double-tilt and analytical sample holders the microscopy is equiped with variety of in situ holders including cryo transfer, cooling, biasing and liquid flow holders. In addition, software for TEM tomography (3D image reconstruction) is available to well-trained users.

Zeiss Libra 120 Cryo-TEM

This microscope is designed for 2C and 3-D and tomographic imaging and analysis of soft materials by cryo-electron microscopy. The 120KV high tension and LaB6 filament TEM utilizes a low-dose high-sensitivity 4k x4k Gatan Ultrascan CCD camera for image acquisition. The column itself has 4 pre-installed apertures for imaging different magnifications, and an in-column omega energy filter. This microscope is equipped with standard Gatan tomography software, and can be used with negatively stained samples as well for screening.

Zeiss Gemini Ultra-55 Analytical Field Emission Scanning Electron Microscope

This microscope is used for imaging and analysis of conducting and insulating samples. The SEM has multiple detectors including in-lens and conventional secondary electron detectors, in-lens and quadrant backscatter detectors, an EDS system for elemental x-ray analysis, and a transmission (STEM) bright/dark field detector compatible with standard TEM grids. Beam energy is variable between 100 eV and 30 kV, with 1 nm resolution above 2 kV and several nm resolution at 100 eV. A range of sample holders are available including standard SEM stubs, wafers to 4", flat, tilted and cross section holders for wafer pieces, and for TEM grids.

PHI 5400 X-ray Photoelectron Spectroscopy (XPS) System

This system allows:

  • conventional (non-monochromatic) Al/Mg Dual-Anode X-ray source
  • spatial resolution 0.5 mm, energy resolution 0.7 eV
  • conducting or insulating samples (ultra-high vacuum compatible) up to 20 mm square, 4 mm thick
  • 4 kV Argon ion sputtering for sample cleaning and shallow (100 nm) depth profiles
  • elemental and chemical state analysis of the first few nm of the surface with ~ 1 atomic percent sensitivity

Zeiss Gemini Supra 55 VP-SEM

This instrument, used for in situ microscopy, has SEM in-lens and conventional secondary detectors, quadrant backscatter detector and a variable pressure (10-100 Pa) secondary detector. It can be configured for various types of in situ experiments including nano-manipulation, scanning probe microscope imaging, mechanical and electrical characterization, cathodoluminescence, and in situ chemical and thermal reactions.

Asylum MFP-3D Atomic Force Microscope

This microscope has a 90 micron closed-loop XY scanner, Z displacement and integrated optical imaging. A range of AFM contrast methods are available including contact imaging, non-contact ("tapping") phase and amplitude imaging, electrical methods including conductivity, electrostatic and Kelvin probe surface potential imaging, mechanical methods including loss tangent, contact resonance, AMFM, nanoindentation, and magnetic imaging with variable field unit. The system has numerous small-volume closed fluid cell that can be used for rapid, controlled humidity experiments or liquid experiments with fluid exchange. Sample heating is available for work in liquids. The control software is easily customized for specialized force or lithography experiments.

Bruker Multimode 8

This microscope has a 90 micron JV scanner for large scans, 10 micron EV scanner, and 1 micron A scanner for very high resolution work. An integrated optical microscope provides easy sample location with 5 micron resolution. A range of AFM contrast methods are available including contact imaging, non-contact ("tapping") phase and amplitude imaging, Quantitative Nanomechanical Mapping (Peak Force Tapping). Sample temperature control is available. The closed fluid cell has 100 microliter volume for precious analytes. The control software is highly automated and easy to use.

Agilent (Molecular Imaging) PicoPlus Scanning Probe Microscope

This microscope is used for in situ imaging in air, controlled gas/humidity or in liquids, including under electrochemical control. This system includes 90 micron and 5 micron AFM scanners and a 1 micron STM scanner. A range of AFM contrast methods are available including contact/friction imaging, non-contact ("tapping") phase and amplitude imaging, and electrical methods including conductivity, tunneling, electrostatic and Kelvin probe surface potential imaging. Atomic lattice resolution on gold or mica can be routinely achieved with suitable tips.

Foundry-built ultra-fast, low noise AFM

During 2010 and 2011 this microscope had an ultra-low noise head built around a 5 micron closed-loop XYZ scanner for high resolution work using an Asylum Research controller. In 2012 a new head was built for high speed scanning with beam reflection or interferometric deflection detection with 2 MHz bandwidth. The microscope now has a 10 micron scanner achieving 10 frames per second with 50 kHz Z piezo bandwidth.

Oxford/Omicron Nano-Auger

This is an ultra-high vacuum scanning electron microscope (SEM) with a hemispherical energy analyzer and an x-ray source. It can perform local Auger spectroscopy for surface chemical analysis with few-nm, resolution, higher than any other technique, and complementary to bulk measurements in analytical TEM. XPS and local reflection energy-loss spectroscopy (REELS) are also supported, as well as in situ heating and sample preparation.

Coherent Chameleon-OPO Tunable Ultrafast Laser

This laser is the cornerstone of the Nano-Optics lab ultrafast spectroscopy user program and is a recent upgrade from the original laser system (Coherent MiraTi:SAF + OPG) acquired as part of the original Foundry equipment in 2006. The new laser has more power and broader tuning range, adding near UV and mid IR ultrafast capabilities. It is more reliable and user-friendly due to full computer control with remote vendor alignment, combined with integration of pump and primary laser in one sealed unit. It supports user projects in many experimental modes including:

  • Two-photon 3D photoluminescence lifetime mapping for photovoltaic characterization.
  • One or two photon TRPL – Time Resolved Photoluminesence Lifetime mapping and spectroscopy, for characterizing nanoscale structures including up-converting nanoparticles and 
single-photon emitters (antibunching)
  • TDTR C Time-Domain Thermo-Reflectance, for characterizing nanoscale thermal properties.
  • TPPL – Two-Photon Photo-Luminescence, for characterizing plasmonic devices.

Bruker Icon Scanning Probe Microscope

The Icon is an ideal AFM for introductory users. The software is highly automated and easy to use. Samples of arbitrary size fit well on the sample chuck up to 12” wafers. The scanner can image up to 100 microns or down to a precision of 0.25 nm. It is equipped with Peak Force Tapping mode for high-resolution imaging of soft materials and Quantitative NanoMechanical (QNM) mapping for mechanical measurements (Modulus, adhesion, and dissipation).

Upcoming Capabilities

Asylum MFP-3D Atomic Force Microscope

The MFP-3D is a versatile general use AFM. It has a 90 micron closed-loop XY scanner, Z displacement and integrated optical imaging. A range of AFM contrast methods are available including contact imaging, non-contact (“tapping”) phase and amplitude imaging, electrical methods including conductivity, electrostatic and Kelvin probe surface potential imaging, mechanical methods including loss tangent, contact resonance, AMFM, nanoindentation, and magnetic imaging with variable field unit. The system has numerous small-volume closed fluid cell that can be used for rapid, controlled humidity experiments or liquid experiments with fluid exchange. Sample heating is available for work in liquids. The control software is easily customized for specialized force or lithography experiments.

Other Capabilities & Tools:

Foundry-built ultra-fast, low noise AFM

During 2010 and 2011, this microscope had an ultra-low noise head built around a 5 micron closed-loop XYZ scanner for high resolution work using an Asylum Research controller. In 2012, a new head was built for high speed scanning with beam reflection or interferometric deflection detection with 2 MHz bandwidth. The microscope now has a 10 micron scanner achieving 10 frames per second with 50 kHz Z piezo bandwidth.

Cryovac Low Temperature STM/AFM

The Createc Low Temperature STM/AFM is a customized microscope that operates in an ultra high vacuum and at temperatures between 4 K and 370 K. The instrument is a combination of PAN-type slider STM with highest spectroscopy performance (1 meV energy resolution), scan range over 800 nm at 4K, and a q plus AFM that allows to perform ultra high resolution AFM. In addition, we incorporated optical access to both couple light directly into the tunnel junction or collect light from the tunnel junction, enabling to study the local electronic structure with atomic resolution while being optically excited. Both, STM and AFM provide subatomic spatial resolution due to the outstanding stability (dz<1 pm) AFM and STM can per operated simultaneously without cross-talk using constant frequency or constant height control.

Park NX10 photocurrent microscope under controlled environment

The Park NX10 is a very easy to use AFM, which includes all typical AFM, topography modes, Kelvin Probe Microscopy, etc. The main use of this microscope is to perform photo current and photo voltage measurements on photo active materials. Two additional specific features that attract users is the set up in a low noise glove box, allowing samples, such as perovskites that can photo oxidize, to be measured using this microscope, plus a special tip approach mode, which approaches the tip at a single measurement pixel, avoiding almost all topography – photo current signal convolution when measuring samples with large topographic features.

NTCMDT Ntegra Scanning Probe Microscope

When operational, this highly customized instrument has the potential to support atomic force microscopy (AFM), confocal Raman and fluorescence microscopy and scanning near-field optical microscopy (SNOM) in one platform.

Leica DM4000 Optical Microscope

This microscope is appropriate for materials science (non-inverted, dry samples). 5x to 100x objectives; bright field/dark field/DIC/Polarization in transmitted or reflected light; color camera and software.

Leica MZ16 Stereo microscope

Appropriate for sample inspection, probing and manipulation, 19 mm working distance, magnification 11 to 180x, color camera and software.

UV Photoluminescence Spectrometer

Wire Bonder

Tunable near-infrared laser (745nm-795nm)

Sample preparation tools

Various sample preparation tools including Langmuir Blodgett trough, UV ozone cleaner, oxygen plasma cleaner, mg balance, ultrasonic bath, 200 C oven and thermal evaporator. Ultra-microtome, plunge freezer, fiber probe assembly station, TEM liquid cell assembly.

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