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FIB Helios G4 Specifications


ION BEAM

energy range0.5 - 30 keV
max current65 nA
min probe size2.5 nm at 30 keV

SEM

energy rangewith bias 20 eV, w/o bias 350 eV
min probe size 0.6 nm at 2-30 keV; 0.7nm at 1 keV
monochromator Working distance4 mm

Stage

Z range16mm
tilt range-10 to 65 degrees
Drift8 nm/min
LiftoutFEI EasyLift (w needle rotation)
GIS2 ports platinum, carbon
Chamber plasma cleaner
Flood gun

Additional Detectors

EDS detector EDAX Octane Super energy dispersive spectrometer (EDS) detector
STEM detector