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Highest Resolution Calibration Tool Created
Industrial users at the Molecular Foundry have created the highest resolution calibration tool with feature sizes of 1.5 nanometers, a breakthrough that won an R&D100 Award.
Significance and Impact
Metrology tools are used to characterize advanced imaging systems from interferometers to electron microscopes.
- To ensure the quality and consistency of substrates, wafer manufacturers in the semiconductor industry rely on precise metrology tools to control the quality of their materials.
- The characterization of metrology systems requires test patterns at a scale about ten times smaller than the measured features.
- aBeam Technologies, using the Molecular Foundry, ALS, APS, and NSLS II, developed the finest metrology tool in the world, utilizing a fabricated pattern with line widths down to 1.5 nanometers.
- The binary pseudorandom structure was produced by depositing a multilayer of two alternating materials using magnetron sputter deposition and then sectioning the stack
S. Babin, G. Calafiore, C. Peroz, R. Conley, N. Bouet, S. Cabrini, E. R. Chan, I. Lacey, W. R. McKinney, V. V. Yashchuk & A. E. Vladar. J. Vac. Sci. Technol. B 2015 33, 06FL01. V. V. Yashchuk, P. J. Fischer, E. R. Chan, R. Conley, W. R. McKinney, N. A. Artemiev, N. Bouet, S. Cabrini, G. Calafiore, I. Lacey, C. Peroz & S. Babin. Rev. Sci. Instrum. 2015 86, 123702.