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Deirdre
OlynicK
Staff Scientist, Nanofabrication Facility
dlolynick@lbl.gov,
510.495.2893 |
Research
interests
- Nano-imprint template fabrication
- E-beam lithography
- Resist processing and chemistry
- Nanoscale plasma etching
Current projects
- Systematic determination of optimum resist/solvent
development chemistry for sub-10 nm resolution
- Plasma
etching of micro and nano-scale silicon features with
ultra-smooth sidewalls.
- Fundamentals of plasma etching
for sub-20 nm features and beyond.
- Nano-imprint template
lithography and etching.
Selected publications
- Olynick, D. L; Liddle, J. A.; Harteneck, B. D., Cabrini
S.; Rangelow, I. W. Nanoscale pattern transfer for templates,
NEMS, and nano-optics, Proceedings of SPIE 6462 (2007).
- Olynick,
D. L.; Rangelow, I.; Liddle, J. A.; Silicon Nanopatterning
using Cr hard-mask and HBr plasma chemistry; Journal
of Vacuum Science & Technology B; Microelectronics
and Nanometer Structures (2005), 23(5), 2073-2077
- Olynick,
Deirdre L.; Harteneck, Bruce D.; Veklerov, Eugene;
Tendulkar, Mihir; Liddle, J. Alexander; Kilcoyne, A.
L. David; Tyliszczak, Tolek. 25 nm mechanically buttressed
high aspect ratio zone plates: Fabrication and performance.
Journal of Vacuum Science & Technology, B: Microelectronics
and Nanometer Structures--Processing, Measurement,
and Phenomena (2004), 22(6), 3186-3190.
- Jung, G.-Y.; Olynick,
D. L.; Straznicky, J.; Li, Z.; Li, X.; Ohlberg, D.
A. A.; Chen, Y.; Wang, S.-Y.; Liddle, J. A.; Tong,
W. M.; Williams, R. Stanley. One-kilobit cross-bar
molecular memory circuits at 30-nm half-pitch fabricated
by nanoimprint lithography. Applied Physics A: Materials
Science & Processing
(2005), A80(6), 1173-1178.
- Olynick, D. L.; Gibson, J.
M.; Averback, R. S. Impurity-suppressed sintering in
copper nanophase materials. Philosophical Magazine A:
Physics of Condensed Matter: Structure, Defects and Mechanical
Properties (1998), 77(5), 1205-1221.
- Yeadon, M.; Yang,
J. C.; Averback, R. S.; Bullard, J. W.; Olynick, D. L.;
Gibson, J. M. In-situ observations of classical grain
growth mechanisms during sintering of copper nanoparticles
on (001) copper. Applied Physics Letters (1997), 71(12),
1631-1633
Education
B. S. Engineering, North Carolina State University,
Raleigh, N. C.
Ph.D. Department of Materials Science and Engineering.
University of Illinois at Urbana-Champaign. Advisor:
J. Murray Gibson. Fannie and John Hertz Fellowship
Thesis: “In-situ Studies of Copper Nano-particles
Using a Novel Tandem Ultra-High Vacuum Particle Production
Chamber Transmission Electron Microscope”
Past professional positions
Applied Materials and Technology and Matrix Integrated
Systems, Senior Process Engineer
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