LBNL Masthead A-Z Index Berkeley Lab masthead Phone Book Jobs Search The Molecular Foundry Home DOE - Office of Science

Publications from Facility Users

2012 |2011-2010 |2009 | 2008-2007 | 2006 | 2005

substrate Uniform residual layers are obtained across the entire substrate, independent of pattern density and feature size variations.

  1. S. Babin, C. Peroz, A. Bugrov, A. Goltsov, I. Ivonin, V. Yankov, S. Dhuey, S. Cabrini, E.-B. Kley, H. Schmidt, "Fabrication of novel digital optical spectrometer on chip," J. Vac. Sci. Technol. B, 27, 6, 3187 (2009). [pdf]

  2. C. Peroz, S. Babin, M. Machin, E. Anderson, S. Cabrini, S. Dhuey and B. Harteneck, "Automatic Measurement of Electron Beam Size by Beam Metrology Technique Using 20 Nm Test Pattern," J. Vac. Sci. Technol. B, 27, 6, 3220 (2009).

    [pdf]
  3. A. S. P. Chang, C. Peroz, X. Liang, S. Dhuey, B. Harteneck, S. Cabrini “Nanoimprint planarization of high aspect ratio nanostructures using inorganic and organic resist materials”  J. Vac. Sci. Technol. B, 27, 6, 2877 (2009).

    [pdf]
  4. S. A. Cybart, S. M. Anton, S. M. Wu, J. Clarke and R. C. Dynes, "Very Large Scale Integration of Nanopatterned Yba2cu3o7−Δ Josephson Junctions in a Two-Dimensional Array," Nano Letters, 9, 10, 3581 (2009).

    [pdf]
  5. E. Kadossov, J. Justin, M. Lu, D. Rosenmann, L. E. Ocola, S. Cabrini and U. Burghaus, "Gas–Surface Interactions with Nanocatalysts: Particle Size Effects in the Adsorption Dynamics of Co on Supported Gold Clusters " Chemical Physics Letters,  483, 4-6, 250 (2009).

    [pdf]
  6. S. Babin, A. Bugrov, S. Cabrini, S. Dhuey, A. Goltsov, I. Ivonin, E. B. Klev, C. Peroz, H. Schmidt and V. Yankov, "Novel Digital Optical Spectrometer-on-Chip," Applied Physics Letters, 95, 4, 041105 (2009). [pdf]

  7. S. Babin, S. Cabrini, S. Dhuey, B. Harteneck, M. Machin, A. Martynov and C. Peroz, "Fabrication of 20 Nm Patterns for Automatic Measurement of Electron Beam Size Using Beametr Technique," Microelectronic Engineering, 86, 4-6, 524 (2009).

    [pdf]
  8. Weis CD, Schuh A, Batra A, Persaud A, Rangelow IW, Bokor J, Lo CC, Cabrini S, Olynick D, Duhey S, Schenkel T, “Mapping of ion beam induced current changes in FinFETs,” Nuclear Instruments & Methods In Physics Research Section B, 267, 8-9, 1222-1225 (2009). [pdf]
  9. V. Mocella, S. Cabrini, A.S.P. Chang, P. Dardano, L. MOretti, I. Rendina, D. Olynick, B. Harteneck, S. Dhuey “Self-Collimation of Light over Millimeter-Scale Distance in a Quasi-Zero-Average-Index Metamaterial,” Physical Review Letters, 102 133902 (2009). [pdf]
  10. G. M. Schmid, M. Miller, C. Brooks, N. Khusnatdinov, D. LaBrake, D, J. Resnick, S. V. Sreenivasan, G. Gauzner, K. Lee, D. Ku, D. Weller, S. Yang, “Step and flash imprint lithography for manufacturing patterned media,” Journal of Vacuum Science and Technology, Part B, vol. 27, no. 2, pp. 573-580 (2009). [pdf]