Other Lithographic Tools (Contact: Michael Elowson; Selven Virasawmy)
- Molecular Imprint Imprio 55 flash imprint lithography (S-FIL™)
- Homemade air cushion imprinting system
- Homemade thermal imprinting system
- ABM optical contact printer for 4 inch wafers
Deposition Systems (Contact: Scott Dhuey)
- Semicore SC600 e-beam (6 pockets) and thermal evaporator
- Home-made electroplating station gold, nickel, silver
- Home-made close spaced sublimation
Wet Processes (Contact: Michael Elowson; Selven Virasawmy)
- Wafab solvent bench VLF for organic flammable solvents (stainless steel)
- Wafab acid and base bench VLF for wet etching (Polypropylene)
- Wafab utility bench VLF for a large variety of wet processes (Polypropylene)
- VWR ultra-sonic cleaning bath
Inspection and Characterization (Contact: Selven Virasawmy)
Horiba Uvisel Spectroscopic Ellipsometer: It measures thin film thickness and optical constants and provides information on material properties such as anisotropy, chemical composition and electrical conductivity.
- Veeco Caliber SPM – AFM (CA260701)
- Veeco Dektak 150 stylus profiler (250G8)
- Zeiss optical microscope
- Leica optical microscope
- Microbalance
- Homemade electron flood gun for large area exposure
- Ramé-Hart contact angle goniometer
Software Tools (Contact: Selven Virasawmy)
- L-Edit layout editor CAD for GDSII
- RSoft photonics simulation software:
- FullWAVE finite-difference time-domain (FDTD)
- BandSOLVE plane wave expansion (PWE) algorithm
- FemSIM finite element method (FEM)
- Lumerical FDTD computational package
