Thermo Fisher Verios 5UC FESEM
The Thermo Fisher Verios 5UC is a Field Emission Scanning Electron Microscope (FESEM) capable of delivering morphological characterization including shape and size of features and chemistry, by collecting secondary and back-scattered electrons emitted while scanning a focused electron beam. It is coupled to an EDAX Octane Elect Super X-Ray Energy Dispersive Spectrometer (X-Ray EDS) used for identifying and mapping the distribution of chemical elements. The system is also equipped with an EDAX Velocity Plus electron backscatter diffraction (EBSD) detector for differentiating between discrete phases based on their crystallographic differences.
The electron beam energy range is variable between 350 V to 30 keV in regular mode and down to 50V using the beam deceleration mode, with 0.6 nm resolution between 2-15 keV and 1 nm at 500 eV. The electron beam probe current can be varied from 1.6 pA to 0.10 µA. The energy resolution of the EDS is 125 eV.
A variety of detection systems are integrated into the microscope.The Everhart Thornley Detector (ETD) collects secondary (SE) and backscattered electrons (BSE) generated by the primary beam interaction with the specimen surface. The Through Lens Detector (TLD) is designed primarily for ultra high resolution imaging using the immersion mode and collects SE and BSE. The Mirror Detector (MD) and In-Column Detector (ICD) are both solid state detectors and therefore offer a better signal to noise ratio with longer dwell times. These collect BSE signal when used without beam deceleration. The Directional Backscattered Detector employs either angular (ABS) or concentric (CBS) segmentation of the detector diode. The CBS distinguishes between BSE scattered far from the beam axis (topographic signal) and close to the beam axis (compositional contrast). In addition, there is a retractable transmission bright/dark field (STEM) detector compatible with standard TEM grids.
