Zeiss Gemini Ultra-55 Analytical Field Emission Scanning Electron Microscope
The Zeiss Gemini Ultra55 is a Field Emission Scanning Electron Microscope (FESEM) capable of deliver morphological characterization including shape and size of features, surface topography and chemistry, by collecting secondary/back-scattered electrons emitted from the sample as a focused electron beam raster the sample’s surface. It is coupled to a Bruker X-Ray Energy Dispersive Spectrometer (X-Ray EDS) used for identifying and mapping the distribution of chemical elements.
The electron beam energy is variable between 100 eV and 30 kV, with 1 nm resolution at and above 1 kV and several nm at 100 eV. The electron beam probe current can be varied from 4 pA to 10 nA. The energy resolution of the EDS is 130 eV.
This microscope has 3 direct detection systems fully integrated in the column: an high efficiency In-lens Secondary Electrons (SE) detector for high contrast topography, an in-column Energy selective Backscattered electron (EsB) detector for low kV ultra-high resolution material contrast, and anIntegrated annular Angle selective Backscattered electron (AsB) detector for compositional and crystal orientation imaging. In addition, the system is equipped with a conventional Everhart-Thornley secondary electron (SE2) detector and a retractable transmission bright/dark field (STEM) detector compatible with standard TEM grids.
A range of sample holders are available including standard SEM stubs, wafers to 4″, flat, tilted and cross section holders for wafer pieces, and for TEM grids.