Ulvac Thermal Annealer
A programmable, near IR (1200C), compact rapid thermal annealing furnace. Capable of heating rates ~50C/s, with a maximum sample size of ~20x20x2mm.
Chemical Vapor Deposition and Thermal Annealing Tube Furnace Reactors
The facility has a number of tube furnace reactors for CVD, MOCVD, chemical conversion, and sample annealing. They are equipped with a variety of inert gasses, reactive gasses, metalorganic, and organochalcogen precursors including: Ar, N2, H2, O2, NH3, CH4, C2H4, H2S, H2Se, (CH4)2S2, and others. The gas flow rates are accurately controlled with mass flow controllers and can be configured to meet changing demands. We have three 1″ Lindberg Blue tube furnace reactors (up to 1100C), one 1″ Lindberg Blue tube furnace reactor (up to 1600C), and two 4.5″ Rapid Thermal Processors (up to 1000C).
