The FEI Helios G4 UX dual beam Focused Ion Beam (FIB) is used for TEM sample preparation, taking advantage of the focused Ga+ ion beam for site-selective material removal and the monochromated field emission scanning electron microscope (SEM) column for imaging. The SEM can be used for chemical analysis through electron dispersive spectroscopy. Platinum or carbon can be deposited for sample protection before thinning or for lift-out procedures with an EasyLift rotatable needle. Destructive tomography is possible with the FEI Slice and View software.
ION BEAM
| energy range | 0.5 – 30 keV |
| max current | 65 nA |
| min probe size | 2.5 nm at 30 keV |
SEM
| energy range | with bias 20 eV, w/o bias 350 eV |
| min probe size | 0.6 nm at 2-30 keV; 0.7nm at 1 keV |
| monochromator Working distance | 4 mm |
Stage
| Z range | 16mm |
| tilt range | -10 to 65 degrees |
| Drift | 8 nm/min |
| Liftout | FEI EasyLift (w needle rotation) |
| GIS | 2 ports platinum, carbon |
| Chamber plasma cleaner | |
| Flood gun |
Additional Detectors
| EDS detector EDAX Octane Super energy dispersive spectrometer (EDS) detector |
| STEM detector |
