Angstrom Quantum Nebula QIS Cluster Deposition System
The Angstrom Engineering Nebula QIS Cluster deposition tool is a fully automated cluster robot deposition system with six modules devoted to the study of superconducting circuits. The first module is the nitrogen glove box wafer loading station, which enables oxygen free preparation of wafers prior to loading into a transfer cassette capable of holding multiple wafers for process scheduling. The QIS cluster tool also has a pulsed DC magnetron sputtering system capable of depositing high purity superconducting metals and nitrides across a range of gas flow rates and at varied throw distances from the sputter target. The third module is a Quantum series shuttered electron beam evaporation system with in-situ ion milling capabilities as well as oxide barrier growth capabilities throw controled oxygen dosing. The fourth and fith modules are atomic layer deposition and eteching (ALD/ALE) chambers devoted exclusively to oxide or nitride chemistries, and the sixth and final chamber is a UHV analytical chamber with x-ray photoelectron and Auger electron spectroscopy characterization, as well as ellipsometry and Fourier transform infrared spectroscopy for optical characterization.
