The image corrected FEI ThemIS (in situ) 60-300 microscope at NCEM is primarily used for in situ experiments including liquid cell, heating, biasing and mechanical testing and for Lorentz TEM and MicroED. Its main components are an X-FEG gun, 5.2 mm pole gap super-twin objective lens, image aberration corrector, Bruker SuperX energy-dispersive x-ray spectroscopy (EDS) detector, a Ceta2 CMOS camera, and a Gatan direct electron K2 camera. The image aberration corrector fully corrects for coherent axial aberrations up to 3rd order and partially compensates for 4th and 5th order aberrations resulting in TEM spatial resolution of 70pm. Installed STEM detectors include a grouped bright field (BF), annular BF, and annular dark field (ADF), as well as a separate high-angle ADF (HAADF) detector. The ADF detector is segmented, allowing for differential phase contrast. The microscope is equipped with a Lorentz lens for field-free imaging of magnetic materials. The TEM is aligned at 60, 80, 120, 200, and 300kV.
A high-speed large field-of-view FEI Ceta2 camera acquires up to 360 frames per second (fps) with large dynamic range, and a Gatan direct electron K2 acquires up to 1600 fps. The ThemIS has 4D-STEM capability using the K2 camera in either counting or high-speed mode. Serial EM is integrated with the Ceta camera. Precession during 4D-STEM is possible with several different cameras. It is equipped to do fast energy dispersive X-ray mapping (EDS) and S/TEM imaging and tomography.
All TEM holders that are compatible with FEI microscopes can be used for heating, cooling and other in-situ experiments. The Protochips Axon data acquisition system is installed to aid with data management of in-situ experiments. Specifically, the Protochips liquid flow and Hummingbird gas flow TEM holders are used in this TEM. See the TEM Holder page for more details.
- FEI low background double-tilt (DT) for EDS
- Gatan 698 Elsa Cryo-Transfer Tomography, EDS
- Gatan 915 DT Cryo-Transfer, EDS
- Gatan 636 Cryo
- Gatan 671 Cryo Straining
- Gatan 654 Straining
- Gatan 652-TA DT Heating to 1000°C
- Hummingbird Tomography, also EDS
- Hysitron PI-95 for mechanical compression, tension, biasing
- Gatan 648 DT Air-Free, also EDS and tomography
- Fischione Single tilt Air-Free , also EDS
- Hummingbird single tilt biasing holder for user-defined MEMs devices
- Protochips Aduro/Fusion Heating/Biasing DT
- Protochips Aduro Heating/Biasing Single tilt
- Protochips Poseidon Liquid Flow
- Hummingbird Gas Flow and Heating
- FEI single tilt for general use
- FEI low background double tilt with hexring for magnetic samples
General Specifications
Accelerating Voltage | 60, 80, 120, 200, and 300 kV |
TEM Information Limit (300kV) | 0.07 nm |
TEM 3rd order spherical aberration | <1 µm (adjustable range +/- 50 um) |
STEM Resolution (300kV) | 0.136 nm |
STEM Spherical Aberration Cs | 1.2 mm |
Detectors
EDS | Four windowless SDD indicated solid angle of 0.7 steradians and 140 eV energy resolution. |
STEM | HAADF, segmented ADF, ADF, BF |
TEM/Diffraction | FEI Ceta2 4k x 4k CMOS with scintillator, 40 fps. Gatan K2-IS direct electron; 10 fps in counted mode; 400 fps full frame in IS mode |