Oxford/Omicron Nano-Auger
This is an ultra-high vacuum scanning electron microscope (SEM) with a hemispherical energy analyzer and an x-ray source. It can perform local Auger spectroscopy for surface chemical analysis with few-nm, resolution, higher than any other technique, and complementary to bulk measurements in analytical TEM. XPS and local reflection energy-loss spectroscopy (REELS) are also supported, as well as in situ heating and sample preparation.