Seminar Date: Tuesday, June 2, 2026
Time: 11:00 AM PT
Location: 67-3111 & Zoom
Talk Title: Multifunctional Lithography Systems: Bridging Fabrication, Materials, and Multi-Physics Integration
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Abstract:
Recent advances in nanoscale to atomic lithography and fabrication highlight the transition toward high-resolution, multi-physics-enabled patterning techniques. In particular, scanning tip/probe lithography and metrology, using wide bandgap semiconductor nanostructures, such as GaN nanowires, enables robust, high-aspect-ratio patterning with sub-7 nm resolution while maintaining mechanical stability and durability. These approaches integrate nanometrology and fabrication, allowing simultaneous imaging and patterning with improved precision compared to conventional silicon-based probes. To achieve scalable and large-area nanosystems,
I will further discuss the convergence of top-down and bottom-up material fabrication employing interferometric lithography and nanowire synthesis. Additionally, the integration of optical, electrical, and mechanical functionalities in nanostructured materials enables applications in photonics and quantum technologies. Overall, these contributions advance lithographic capabilities toward atomic-scale control and q-bit fabrication, bridging fabrication, characterization, and device integration in next-generation nanotechnology, which combines optical analysis, nano or atomic fabrication, and metrology systems.
Bio:
Prof. Tito Busani worked as a process engineer at STMicroelectronics and as a research engineer at IMEC prior to earning a doctoral degree in Physics and nanomaterials at the University of Grenoble in France with distinction. He continued to work on transistor reliability and switching memories during his postdoc funded by the AFRL. He is currently an Associate Professor in Electrical and Computer Engineering and Endowed Associate Chair for Microelectronics at the University of New Mexico
In the past 15 years, his research focus has been on energy materials and atomic precision fabrication using wide bandgap materials, optical ring resonators, opto-mechanic modulators, and waveguides. Particularly, he has worked on tip metrology and nano to quantum lithography methods, as well as on machine learning applied to photovoltaic HIT cells. His current research interest is 1D nanostructured materials and metasurfaces, nano lasers and nano membranes, and their integration into multi-functional devices for advancements in qubits and GHz communications. Dr. Busani leads projects on agrivoltaics and leads the effort for heterogeneous integration of interferometers for quantum optical computing, as part of one of the 4 US regional centers of NSF NQVL.
Dr. Busani is a member of the organizing committee for the SPIE Advanced Lithography + patterning conference, he is the president of the New Mexico Energy Manufacturing Consortium, and he is also a member of the NM local chapter for the Vacuum Society. He has organized sustainable energy symposiums at the Materials Research Society, and he also served as a consultant for large European energy industries.
